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Measuring Equipment Specifications
  • Interferometer : flat / cylinder / curvature measurement (CX ≤ 700, CC ≤ 1000)
     – RMS Simple Repeatability <0.06nm, λ/10,000(2σ)
     – RMS Wavefront Repeatability <0.35nm, λ/1,800(mean + 2σ)
     – Peak Pixel Deviation < 0.5nm, λ/1,200(99.5%)
     – Pupil Focus Range 4inch
  • Three-dimensional measuring devices: measurement of parallelism/floor plan/squareness/ roundness
     – Resolution(um) : Standard 0.5, High Accuracy 0.1
     – Maximum Permissible : Standard 3.5+L/300, 3.5, High Accuracy 3.0+L/300, 3.0
  • Prism Master: angle measurement
     – Electronic autocollimator : EFL 300 mm, Diameter 57mm
     – Accuracy of the autocollimator : Resolution 0.01; Repeatability ±0.1
  • Surface roughness measurement: surface roughness measurement (Ra)
     – 10x, 50x, 100x Measurable
     – Vertical Scan Range
     – 150um, Extended scan range to 20mm
     – Vertical Resolution < 0.1mm
     – Lateral Resolution 0.36 to 9.50 um
     – RMS Repeatability <0.01nm
  • Spectrometers: measurement of transmittance / reflectance (absolute reflection) / absorbance
     – Wavelength range 190 ~ 2800nm / 250 ~ 2500nm (with Auto Polarizer)
     – Transmittance 0 to 85 degrees
     – Reflectivity 5 to 85 degrees
     – Measurement error (10 times in case of repeating measurement) <0.1%
  • Mahr LD260: Measurement of plane / aspherical surface / cylinder / shape and roughness
     – Probe measurement range
       (1) 13mm (100mm probe arm)
       (2) 26 mm (200mm probe arm)
      – Drive X axis uncertainty: ±0.2*L.1000) um
      – Measurement time: 5 ~ 10 min
      – Measuring range / Resolution (Z-axis) 13mm/0.8nm
      – Measuring range / Resolution (X-axis) 0.1-260mm/0.8nm
      – Minimum measuring distance (X axis) 0.05-30um
      – Positioning accuracy: 0.1um
  • ASI: Measurement of plane /aspherical surface/curvature (CX550 / CX700)
     – Repeatability ≤ 10nm (λ/60)rms
     – Reproducibility ≤ 20nm (λ/30)rms
     – Accuracy ≤ 30nm (λ/20)rms
     – Diameter ≤ 300mm can be measured
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